Mks Astron 2l Manual -

MKS recommends periodic refurbishment (every 6–12 months) of high-wear components like electronic circuit boards and plasma blocks.

: Requires water cooling with a minimum flow of 2.0 gpm during operation and 0.5 gpm during idle. mks astron 2l manual

No. The high voltage and current sensitivity are proprietary to MKS inverted magnetron gauges. Using other gauges will yield incorrect readings and may damage the controller. mks astron 2l manual

The Astron 2L is designed for high-flow, high-concentration reactive gas delivery. Efficiently dissociates process gases (like NF3cap N cap F sub 3 ) into reactive species for cleaning deposition chambers. mks astron 2l manual